Influence analysis of preionization of excimer laser

Excimer laser plays an important role in economic production because of its short wavelength, high refrequency and large energy. In the output characteristics excimer lasers, beam quality energy stability are characters high-end light sources, whether pre-ionization process is developed sufficiently or not key to system pulses with stable This paper mainly aims at ArF laser, establishes one- dimension two-dimension simulation calculation model. Based on fluid method COMSOL Multiphysics software, numerical analysis carried out, focusing study ionization wave propagation relationship between main discharge. The results show that spatial structure corona rod electrode should be considered comprehensively when designing system. Appropriate voltage can make discharge triggered during maintenance free electrons, which effectively reduce voltage, avoid streamer arc discharge, improve stability.